This is an example of our gas control loop. This image is displayed on the computer screen. When active the gas valve light turns green indicating the valve is energized. Gas setpoints are programmed in the setpoint block as sccm. The flow is read out by the flow block. The gas panel can control any number of gases. This panel can be modified to fit any assembly or process station. The names of the MFC's and valves can be changed to meet an existing need such that relabeling of older systems is not necessary.
