Electrostatic Clamping

We are currently looking for Joint Development partners to replace current generation anodized components with improved anodized components and ceramic type ESC's.

Praxair Surface Technologies is a leader in Electro Static Chuck technology. Our products target next generation substrate clamping requirements for improved heat transfer, plasma resistance, reduced particle counts, and increased holding force.

Custom clamping configurations and customer specific requirements are also available.

ESC system level issues can be analyzed and rectified. A Praxair Surface Technologies alternative part is our first choice in your system if the ESC is defective. We will recommend improvements, and corrective action for the defective component, assembly, or system. Our engineers can implement the recommended corrective action on site.

Praxair Surface Technologies produces a complete line of Electro Static Chucks for semiconductor manufacturing.

ESC's are available for evaluation. If interested please request information via email. Please provide your name, company name, phone number, state, country and a brief description of your application.

Theory

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