We have two sealed vacuum test chambers that are configured to test a variety of semiconductor, solar and LED process chamber components. These components include but are not limited to; chucks, electrostatic chucks, pedestals, focus rings, ceramics and other chamber hardware.
We can test chucks and pedestal up to 10" diameter
Heat transfer and material properties can be evaluated under operating conditions (at low pressure)
Electrical properties such as dielectric constant and voltage breakdown can be characterized for real world operation
RF plasma can be introduced to the component or substrate to confirm or deny suspected characteristics
Nitrogen, Argon, Oxygen, and Helium are available for evaluating component characteristics
Back to: Capabilities Statement